Vacuum Leak Rate Converter
Convert Pa·m³/s, mbar·L/s and atm·cc/s instantly.
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About Vacuum Leak Rate Units
- Leak rate (Q) measures the rate of gas flow through a leak, expressed as pressure × volume per unit time (throughput). It is the product of the leakage flow velocity and the pressure differential — equivalent to power in some contexts.
- Pa·m³/s is the SI unit for leak rate. It is also called the throughput unit in vacuum technology. 1 Pa·m³/s = 10 mbar·L/s = 9.869 atm·cc/s. The SI unit is used in precision semiconductor, aerospace and nuclear leak testing.
- mbar·L/s is the most common practical unit in European vacuum engineering and helium leak testing. The sensitivity threshold of a helium mass spectrometer leak detector is typically 1×10⁻¹² mbar·L/s (He).
- atm·cc/s (atmospheric cm³/s, also called atm·mL/s or He sccs) is used in US aerospace and military standards. 1 atm·cc/s = 0.101325 Pa·m³/s = 1.01325 mbar·L/s.
| 1 单位 | = Pa·m³/s | = mbar·L/s | = atm·cc/s |
|---|---|---|---|
| 帕·立方米/秒(Pa·m³/s) | 1 | 10 | 9.8692 |
| 毫巴·升/秒(mbar·L/s) | 0.1 | 1 | 0.98692 |
| 大气压·毫升/秒(atm·cc/s) | 0.101325 | 1.01325 | 1 |